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Silicon Micromachining Techniques for THz applications
Date: Monday, June 6, 2011 Time: 4:00 PM Location: 125 Steele, Caltech Speaker: Choonsup Lee
Kavli Nanoscience Institute / Microdevices Lab seminar
Silicon micromachining techniques have been effective in addressing multi-pixel heterodyne detector arrays and they have been used in developing terahertz components up to 600 GHz and beyond. We have developed an integrated receiver architecture—radiometer-on-a-chip (ROC)—which uses silicon micromachined waveguide components integrated with terahertz active devices to build a heterodyne receiver front-end at 600 GHz. Integrating antennas with silicon micromachined receiver has been a big challenge. Conventional metal-machined bulky horn antennas are not suitable for the ROC receiver architecture. We developed a novel micro-lens antenna array using lithographic techniques to overcome this. In this talk, the latest results on silicon micromachined terahertz passive components, a 600 GHz ROC, and silicon microlens array for multi-pixel detector arrays will be presented.