Abstract:

Silicon imagers are ubiquitous in daily life and in science instruments. Nearly three decades ago, back illumination of silicon imagers was invented to extend the response range into the ultraviolet in part for the Hubble Space Telescope. It has become clear in the past several years that back illumination is key to high performance imaging in all designs of silicon arrays. This talk will discuss history, physics, results, and applications of back illumination with an emphasis on delta doping and its results. Delta doping is a passivation technique for back illuminated silicon imagers which was invented at JPL. In addition, the talk will discuss spinoffs into other materials, devices, and applications.